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Engineering - Electronics & Electrical Engineering | Multi-Wafer Rotating MEMS Machines - Turbines, Generators, and Engines

Multi-Wafer Rotating MEMS Machines

Turbines, Generators, and Engines

Lang, Jeffrey (Ed.)

2010, XIV, 454p. 604 illus., 302 illus. in color.

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  • Describes how turbine generators, motor compressors, rocket motors and combustors have been used as energy sources at the MEMS scale
  • Discusses in great detail how to model and manage systems-level trade-offs in complex MEMS devices using the gas turbine engine, and in particular its motor compressors and turbine generators
  • Provides a detailed discussion of the critical integration and design decisions that must take place when building a power supply at the MEMs scale
  • Contributing authors are mostly at MIT

Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark Atlanta University, and the University of Maryland at College Park.

The overall objective of the Micro Engine Project was to develop a small but power-dense gas turbine generator based on MEMS fabrication technologies. Thus, the project sought to develop a fuel-burning jet engine that would drive an electric generator to produce electric power for general purpose use.  Along the way, the project would advance the science and engineering of many disciplines from the MEMS perspective.

The Micro Engine Project was by its very nature a highly mult-disciplinary project pursuing advances in materials, structures, fabrication, combustion, heat transfer, turbomachinery, bearings and electromechanics, all at the MEMS scale.  Many of these topics are addressed in this volume, including:

materials structures and packaging

multi-wafer MEMS fabrication and and bonding technologiesElectroplating magnetic components

electroplating magnetic structures into silicon

very-high-speed air bearings

thermofluids and turbomachinery

electric and magnetic generators

combustion

About The MEMs Reference Shelf:

"The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner."

STEPHEN D. SENTURIA
Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus

Content Level » Research

Keywords » Generator - MIT gas turbine engine - Motor - Sensor - Wafer - combustion - electrical engineering - gas turbine - material - materials selection - microelectromechanical system (MEMS) - microsystems - power MEMS device - sensors - turbomachinery

Related subjects » Circuits & Systems - Electronics & Electrical Engineering - Energy - Energy Technology

Table of contents 

to PowerMEMS.- System Design Considerations and Device Overview.- Materials, Structures and Packaging.- Microengine Fabrication.- Fabrication of Microscale Rotating Magnetic Machines.- High-Speed Gas Bearings for Micro-Turbomachinery.- Thermofluidics and Turbomachinery.- Motors and Generators.- Microcombustors for Rotating Machinery.

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Distribution rights for India: CBS Publishers, New Delhi, India

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