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Theory and Application of Laser Chemical Vapor Deposition

  • Book
  • © 1995

Overview

Authors:
  1. Jyoti Mazumder

    1. University of Illinois at Urbana-Champaign, Urbana, USA

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  2. Aravinda Kar

    1. University of Central Florida, Orlando, USA

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    You can also search for this author in PubMed   Google Scholar

Part of the book series: Lasers, Photonics, and Electro-Optics (LPEO)

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Table of contents (5 chapters)

  1. Front Matter

    Pages i-xii
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  2. Introduction

    • Jyoti Mazumder, Aravinda Kar
    Pages 1-56

  3. Pyrolytic LCVD

    • Jyoti Mazumder, Aravinda Kar
    Pages 57-122

  4. Photolytic LCVD

    • Jyoti Mazumder, Aravinda Kar
    Pages 123-214

  5. Pyrolytic LCVD Modeling

    • Jyoti Mazumder, Aravinda Kar
    Pages 215-293

  6. Photolytic LCVD Modeling

    • Jyoti Mazumder, Aravinda Kar
    Pages 295-383

  7. Back Matter

    Pages 385-395
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Keywords

About this book

In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.

Authors and Affiliations

  • University of Illinois at Urbana-Champaign, Urbana, USA

    Jyoti Mazumder

  • University of Central Florida, Orlando, USA

    Aravinda Kar

Bibliographic Information

  • Book Title: Theory and Application of Laser Chemical Vapor Deposition

  • Authors: Jyoti Mazumder, Aravinda Kar

  • Series Title: Lasers, Photonics, and Electro-Optics

  • DOI: https://doi.org/10.1007/978-1-4899-1430-9

  • Publisher: Springer New York, NY

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer Science+Business Media New York 1995

  • Hardcover ISBN: 978-0-306-44936-9Published: 31 October 1995

  • Softcover ISBN: 978-1-4899-1432-3Published: 11 June 2013

  • eBook ISBN: 978-1-4899-1430-9Published: 29 June 2013

  • Edition Number: 1

  • Number of Pages: XII, 396

  • Topics: Electrical Engineering, Optical and Electronic Materials

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