Integrated Optics, Microstructures, and Sensors

1. Front Matter

   Pages i-xxi

   PDF

2. Integrated Optics

   1. Front Matter

      Pages 1-4

      PDF

   2. Two and One Dimensional Dielectric Waveguides

      • M. Tabib-Azar

      Pages 5-44

   3. Optical Properties of Materials

      • Meng-jen John Wu

      Pages 45-69

   4. Passive Optical Devices

      • M. Tabib-Azar

      Pages 71-97

   5. Active Optical Devices

      • M. Tabib-Azar

      Pages 99-115

   6. Complete Waveguide Structures

      • Meng-jen John Wu

      Pages 117-141

3. Microstructures and Fabrication Methods

   1. Front Matter

      Pages 143-146

      PDF

   2. Fabrication of Microstructures

      • M. Tabib-Azar

      Pages 147-163

   3. Fabrication of Integrated Optics

      • M. Tabib-Azar

      Pages 165-192

   4. Mechanics of Deformable Silicon Microstructures

      • M. Tabib-Azar

      Pages 193-206

4. Optical Sensors

   1. Front Matter

      Pages 207-209

      PDF

   2. Sensing Means and Sensor Shells

      • A. Garcia-Valenzuela, M. Tabib-Azar

      Pages 211-235

   3. Integrated and Fiber Optics Sensors “Basic Concepts and Devices”

      • Margaret Tuma

      Pages 237-266

   4. Force, Displacement, and Acceleration Sensors

      • A. Garcia-Valenzuela, M. Tabib-Azar

      Pages 267-284

   5. Optical Temperature Sensors

      • Glenn Beheim

      Pages 285-313

   6. Optical Chemical Sensors

      • S. Amartur, A. Garcia-Valenzuela, M. Tabib-Azar

      Pages 315-345

   7. Sensor Design Examples and Additional Considerations

      • Meng-jen John Wu, M. Tabib-Azar

      Pages 347-363

   8. Comparison Between Electric, Magnetic, and Optical Sensors

      • A. Garcia-Valenzuela, M. Tabib-Azar

      Pages 365-392

5. Back Matter

   Pages 393-399

   PDF

Controlling the mechanical, electrical, magnetic, and optical properties of materials by advanced fabrication methods (Le. ; Molecular Beam Epitaxy and Metal-Organic Chemical Vapor Deposition) has become the new paradigm in our research era. Sensors, being the most vital part of the electronic data processing and decision making machines, stand to gain the most from engineering of the properties of materials. Microfabrication technology has already contributed significantly to the batch fabrication of micro-sensors with higher over all qualities compared to their counterparts that are fabricated using other methods. Batch fabrication of micro-sensors i) results in more uniform properties of co-fabricated devices, ii) nearly eliminates the need for characterization of individual sensors, and iii) eliminates a need for laborious alignment procedures. A less obvious benefit of using microfabrication methods is the possibility of precise control over the dimensions of the sensor. This control enables engineering of some of the properties of the material which affect the sensor's operation. There are many examples of this in the literature. Optical sensors are known to have superior properties over their counterparts that use other (i. e. ; electrostatic and magnetic) means of detection. To name a few, these advantages are: i) immunity to electromagnetic interferences, ii) higher sensitivities compared to the other types of sensors, iii) simplicity of operation principles, and iv) simplicity of overall construction.

• Counter
• design
• electronics
• integrated optics
• interference
• material
• mechanics
• optical devices
• optical properties
• optics
• sensor

• Case Western Reserve University, Cleveland, USA

  Massood Tabib-Azar

Policies and ethics