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  • © 2010

RF MEMS Switches and Integrated Switching Circuits

Authors:

  • Presents RF Switches and switching circuit MEMS devices in a unified framework covering all aspects of engineering innovation, design, modeling, fabrication, control and experimental implementation
  • Discusses RF switch devices in detail, with both system and component-level circuit integration using micro- and nano-fabrication techniques
  • Includes an emphasis on design innovation and experimental relevance rather than basic electromagnetic theory and device physics
  • Includes supplementary material: sn.pub/extras

Part of the book series: MEMS Reference Shelf (MEMSRS, volume 5)

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Hardcover Book USD 169.99
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  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
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Table of contents (10 chapters)

  1. Front Matter

    Pages i-x
  2. Introduction

    • Ai Qun Liu
    Pages 1-20
  3. Lateral Series Switches

    • Ai Qun Liu
    Pages 22-64
  4. Capacitive Shunt Switches

    • Ai Qun Liu
    Pages 65-82
  5. Coplanar Waveguide Transmission Line

    • Ai Qun Liu
    Pages 83-113
  6. Capacitive Switching Bandpass Filters

    • Ai Qun Liu
    Pages 189-206
  7. Substrate Transfer Process

    • Ai Qun Liu
    Pages 207-227
  8. Surface Planarization Process

    • Ai Qun Liu
    Pages 229-264
  9. Back Matter

    Pages 265-271

About this book

Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one to not only observe and process information of all types from small scale systems, but also to affect changes in systems and the environment at that scale. “RF MEMS Switches and Integrated Switching Circuits” builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on RF MEMS switches and micromachined switching circuits, and presents a unified framework of coverage. This volume includes, but is not limited to, RF MEMS approaches, developments from RF MEMS switches to RF switching circuits, and MEMS switch components in circuit systems. This book also: -Presents RF Switches and switching circuit MEMS devices in a unified framework covering all aspects of engineering innovation, design, modeling, fabrication, control and experimental implementation -Discusses RF switch devices in detail, with both system and component-level circuit integration using micro- and nano-fabrication techniques -Includes an emphasis on design innovation and experimental relevance rather than basic electromagnetic theory and device physics “RF MEMS Switches and Integrated Switching Circuits” is perfect for engineers, researchers and students working in the fields of MEMS, circuits and systems and RFs.

Authors and Affiliations

  • School of Electrical & Electronic, Engineering, Nanyang Technological University, Singapore, Singapore

    Ai-Qun Liu

Bibliographic Information

Buy it now

Buying options

eBook USD 129.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 169.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access