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Engineering | Micro and Nano Fabrication - Tools and Processes

Micro and Nano Fabrication

Tools and Processes

Gatzen, Hans H., Saile, Volker, Leuthold, Jürg

2015, XXVI, 519 p. 357 illus., 54 illus. in color.

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  • Describes the tools required for fabricating MNEMS systems
  • Gives insight into the process technologies
  • Fits for practitioners and students of MNEMS

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Content Level » Upper undergraduate

Keywords » MEMS - MNEMS - Micro Electro-mechanical Systems - NEMS - Nano Electro-mechanical Systems - Thin-film fabrication - fabrication processes - fabrication tools

Related subjects » Engineering - Production & Process Engineering

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Distribution rights for India: Researchco Book Centre, New Delhi, India

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