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Introduction to Microsystem Design

  • Book
  • © 2011

Overview

Authors:
  1. Werner Karl Schomburg

    1. , Konstruktion und Entwicklung, RWTH Aachen, Aachen, Germany

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  • Many tables with equations required for calculations of basic elements
  • Systematic description of most actuators and sensors in micro technique
  • Includes exercises Characteristic curves of most actuators and sensors
  • Includes supplementary material: sn.pub/extras

Part of the book series: RWTHedition (RWTH, volume 1)

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Table of contents (23 chapters)

  1. Front Matter

    Pages i-xxi
    Download chapter PDF

  2. Introduction

    • Werner Karl Schomburg
    Pages 1-2

  3. Scaling Laws

    • Werner Karl Schomburg
    Pages 3-4

  4. Elastic Deformations

    • Werner Karl Schomburg
    Pages 5-7

  5. Thin Films

    • Werner Karl Schomburg
    Pages 9-20

  6. Conductor Paths

    • Werner Karl Schomburg
    Pages 21-27

  7. Membranes

    • Werner Karl Schomburg
    Pages 29-52

  8. Strain Gauges on Membranes

    • Werner Karl Schomburg
    Pages 53-64

  9. Beams

    • Werner Karl Schomburg
    Pages 65-84

  10. Vibrations

    • Werner Karl Schomburg
    Pages 85-106

  11. Capillaries

    • Werner Karl Schomburg
    Pages 107-130

  12. Capacitive Forces

    • Werner Karl Schomburg
    Pages 131-136

  13. Piezoelectric Effect

    • Werner Karl Schomburg
    Pages 137-157

  14. Thermal Actuators

    • Werner Karl Schomburg
    Pages 159-176

  15. Microoptics

    • Werner Karl Schomburg
    Pages 177-189

  16. Diffusion

    • Werner Karl Schomburg
    Pages 191-201

  17. Microvalves

    • Werner Karl Schomburg
    Pages 203-228

  18. Micropumps

    • Werner Karl Schomburg
    Pages 229-250

  19. Microdosing

    • Werner Karl Schomburg
    Pages 251-252

  20. Analogies of Physical Domains

    • Werner Karl Schomburg
    Pages 253-260
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Keywords

About this book

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.

Authors and Affiliations

  • , Konstruktion und Entwicklung, RWTH Aachen, Aachen, Germany

    Werner Karl Schomburg

About the author

Univ.-Prof. Dr. Werner Karl Schomburg was born in 1955 at Kiel, Germany. In 1983 he got his diploma in theoretical physics from Kiel University. He stayed at CERN in Geneva, Switzerland, for 3 month in 1982. He obtained his PhD from a university at Munich (LMU) in experimental nuclear physics in 1988. Until 2003 Prof. Schomburg was working at Karlsruhe Research Center, Institute of Micro Structure Technique. His group developed in this time the first micro pump, the first micro valve, and the first micro flow and micro pressure sensor from polymer. In 2004 he became a professor at RWTH Aachen University. From 2006 to 2009 he spent 3 weeks each year teaching at Tsinghua University in Beijing, China.

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