Authors:
- Many tables with equations required for calculations of basic elements
- Systematic description of most actuators and sensors in micro technique
- Includes exercises Characteristic curves of most actuators and sensors
- Includes supplementary material: sn.pub/extras
Part of the book series: RWTHedition (RWTH, volume 1)
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Table of contents (23 chapters)
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Front Matter
About this book
Authors and Affiliations
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, Konstruktion und Entwicklung, RWTH Aachen, Aachen, Germany
Werner Karl Schomburg
About the author
Bibliographic Information
Book Title: Introduction to Microsystem Design
Authors: Werner Karl Schomburg
Series Title: RWTHedition
DOI: https://doi.org/10.1007/978-3-642-19489-4
Publisher: Springer Berlin, Heidelberg
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2011
Softcover ISBN: 978-3-642-26852-6Published: 03 August 2013
eBook ISBN: 978-3-642-19489-4Published: 30 May 2011
Series ISSN: 1865-0899
Series E-ISSN: 1865-0902
Edition Number: 1
Number of Pages: XXII, 322
Topics: Nanotechnology and Microengineering, Optical and Electronic Materials, Applied and Technical Physics, Circuits and Systems