Overview
- State-of-the-art design and application of electromagnetic microactuators
- Newly developed microproduction technologies
- Includes supplementary material: sn.pub/extras
Part of the book series: Microtechnology and MEMS (MEMS)
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Table of contents (24 chapters)
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Design and Construction
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Guiding and Measuring in Active Microsystems
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Manufacturing and Fabrication
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Microassembly
Keywords
About this book
Editors and Affiliations
Bibliographic Information
Book Title: Design and Manufacturing of Active Microsystems
Editors: Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach
Series Title: Microtechnology and MEMS
DOI: https://doi.org/10.1007/978-3-642-12903-2
Publisher: Springer Berlin, Heidelberg
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2011
Hardcover ISBN: 978-3-642-12902-5Published: 10 March 2011
Softcover ISBN: 978-3-642-26738-3Published: 21 March 2014
eBook ISBN: 978-3-642-12903-2Published: 04 March 2011
Series ISSN: 1615-8326
Series E-ISSN: 2365-0680
Edition Number: 1
Number of Pages: XII, 444
Topics: Nanotechnology and Microengineering, Mechatronics, Manufacturing, Machines, Tools, Processes, Nanotechnology