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Microwave Discharges

Fundamentals and Applications

  • Book
  • © 1993

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Part of the book series: NATO Science Series B: (NSSB, volume 302)

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Table of contents (35 chapters)

  1. Microwave Plasma Sources

  2. Diagnostics

Keywords

Editors and Affiliations

  • Instituto Superior Técnico, Centro de Electrodinâmica da Universidade Técnica de Lisboa, Lisbon, Portugal

    Carlos M. Ferreira

  • Groupe de physique des plasmas, Université de Montréal, Montréal, Canada

    Michel Moisan

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