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  • Conference proceedings
  • © 1982

Silicon Chemical Etching

Editors:

Part of the book series: Crystals (CRYSTALS, volume 8)

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Table of contents (3 papers)

  1. Front Matter

    Pages i-vii
  2. Czochralski-Grown Silicon

    • Werner Zulehner, Diethart Huber
    Pages 1-143
  3. Dendritic Web Growth of Silicon

    • Raymond G. Seidensticker
    Pages 145-172
  4. Back Matter

    Pages 225-228

About this book

In the first contribution to this volume we read that the world-wide production of single­ crystal silicon amounts to some 2000 metric tons per year. Given the size of present-day silicon-crystals, this number is equivalent to 100000 silicon-crystals grown every year by either the Czochralski (80%) or the floating-zone (20%) technique. But, to the best of my knowledge, no coherent and comprehensive article has been written that deals with "the art and science", as well as the practical and technical aspects of growing silicon­ crystals by the Czochralski technique. The same could be said about the floating-zone technique were it not for the review article by W. Dietze, W. Keller and A. Miihlbauer which was published in the preceding Volume 5 ("Silicon") of this series (and for a monograph by two of the above authors published about the same time). As editor of this volume I am very glad to have succeeded in persuading two scien­ tists, W. Zulehner and D. Huber, of Wacker-Chemitronic GmbH - the world's largest producer of silicon-crystals - to write a comprehensive article about the practical and scientific aspects of growing silicon-crystals by the Czochralski method and about silicon­ wafer manufacture. I am sure that many scientists or engineers who work with silicon­ crystals -be it in the laboratory or in a production environment - will profit from the first article in this volume.

Bibliographic Information

  • Book Title: Silicon Chemical Etching

  • Editors: J. Grabmaier

  • Series Title: Crystals

  • DOI: https://doi.org/10.1007/978-3-642-68765-5

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag Berlin Heidelberg 1982

  • Softcover ISBN: 978-3-642-68767-9Published: 07 December 2011

  • eBook ISBN: 978-3-642-68765-5Published: 06 December 2012

  • Series ISSN: 0172-5076

  • Edition Number: 1

  • Number of Pages: VIII, 226

  • Topics: Inorganic Chemistry, Physical Chemistry

Buy it now

Buying options

eBook USD 84.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access