The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2
Proceedings of the Electronics and Dielectrics Science Divisions of the Electrochemical Society's Second Symposium on the Physics and Chemistry of the SiO2 and the Si-SiO2 Interface held in St. Louis, Missouri, May 18-21, 1992
Deal, B.E., Helms, C.R. (Eds.)
1993, XVI, 503 p.
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