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  • © 2018

Optical Characterization of Thin Solid Films

  • Offers a sophisticated synthesis of fundamental and applied topics and a didactic presentation
  • Excellent interconnectedness of chapters through authors' belonging to collaborating working groups
  • Written by international top experts involved in industrial research and development

Part of the book series: Springer Series in Surface Sciences (SSSUR, volume 64)

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Table of contents (16 chapters)

  1. Front Matter

    Pages i-xxiv
  2. Introduction and Modelling

    1. Front Matter

      Pages 1-1
    2. Introduction

      • O. Stenzel, Miloslav Ohlídal
      Pages 3-10
    3. Universal Dispersion Model for Characterization of Thin Films Over Wide Spectral Range

      • Daniel Franta, Jiří Vohánka, Martin Čermák
      Pages 31-82
    4. Predicting Optical Properties from Ab Initio Calculations

      • Pavel Ondračka, David Holec, Lenka Zajíčková
      Pages 83-104
  3. Spectrophotometry and Spectral Ellipsometry

    1. Front Matter

      Pages 105-105
    2. Optical Characterization of Thin Films by Means of Imaging Spectroscopic Reflectometry

      • Miloslav Ohlídal, Jiří Vodák, David Nečas
      Pages 107-141
    3. Ellipsometry of Layered Systems

      • Ivan Ohlídal, Jiří Vohánka, Martin Čermák, Daniel Franta
      Pages 233-267
  4. Characterization of Defective and Corrugated Coatings

    1. Front Matter

      Pages 269-269
    2. Optical Characterization of Thin Films Exhibiting Defects

      • Ivan Ohlídal, Martin Čermák, Jiří Vohánka
      Pages 271-313
    3. Resonant Waveguide Grating Structures

      • Stefanie Kroker, Thomas Siefke
      Pages 341-358
    4. Polarization Control by Deep Ultra Violet Wire Grid Polarizers

      • Thomas Siefke, Stefanie Kroker
      Pages 359-374
  5. Scatter and Absorption

    1. Front Matter

      Pages 375-375
    2. Roughness and Scatter in Optical Coatings

      • M. Trost, S. Schröder
      Pages 377-405

About this book

This book is an up-to-date survey of the major optical characterization techniques for thin solid films. Emphasis is placed on practicability of the various approaches. Relevant fundamentals are briefly reviewed before demonstrating the application of these techniques to practically relevant research and development topics. The book is written by international top experts, all of whom are involved in industrial research and development projects.

Editors and Affiliations

  • Abbe School of Photonics, Friedrich-Schiller-University Jena, Jena, Germany

    Olaf Stenzel

  • Institute of Physical Engineering, Brno University of Technology, Brno, Czech Republic

    Miloslav Ohlídal

About the editors

Olaf Stenzel finished his diploma thesis in laser spectroscopy at the physics department of Moscow State University, Russia, in 1986. He received his PhD from Chemnitz University of Technology, Germany, in 1990 and habilitated there in 1999 in the field of optical properties of heterogeneous optical coatings. From 2001, he has worked at the Optical Coating Department of Fraunhofer Institute for Applied Optics and Precision Engineering IOF in Jena, Germany. There he worked for several years as  the group manager for optical coating characterization. He is the author of The Physics of Thin Film Optical Spectra: An Introduction, (Springer 2005, 2015) and Optical Coatings: Material Aspects in Theory and Practice, (Springer 2014). Currently his focus is on teaching at the Abbe School of Photonics at Friedrich Schiller Universität Jena, Germany, where he reads lectures on "Structure of Matter" and "Thin Film Optics" for master of photonics students. He is a member of OSA - The Optical Society.

Miloslav Ohlídal is a Professor of Applied Physics at the Brno University of Technology, Czech Republic. He was educated at the Masaryk University Brno, Czech Republic, where he received his RNDr. (1975) and Ph.D. (1989) degrees in Physics. From 1977-1981 he was a research worker at the Military Institute 060, where he dealt with military applications of lasers. Since 1981 he is engaged in the optical research at the Institute of Physical Engineering, Brno University of Technology. He directs the Laboratory of Coherent Optics. His research spans the various aspects of optics of thin films, laser light scattering, study of surface topography by optical methods, and optical instruments designing. Over the several past years his group has developed the technique of imaging spectroscopic reflectometry for optical characterization of thin films. He cooperates closely with industry. Prof. M. Ohlídal is a member of SPIE - The International Society for Optical Engineering, OSA-The Optical Society, and The Union of Czech Mathematicians and Physicists.

Bibliographic Information

Buy it now

Buying options

eBook USD 149.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 199.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 199.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access