Overview
- Provides a complete set of mechanical models
- Introduces the most relevant damping mechanisms
- Maximizes reader insight into sensing, transduction, and noise
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Table of contents (6 chapters)
Keywords
- Resonance frequency
- Eigenmodes
- Continuum mechanical structures
- Vibrations
- Liquid damping
- Gas damping
- Clamping loss
- Intrinsic damping
- Frequency response
- Transduction
- Amplitude noise
- Frequency noise
- Nanomechanical sensing
- Resonator crystal
- Thermoelastic actuation
- String resonators
- Top-down fabrication
About this book
The applied approach found in this book is appropriate for engineering students and researchers working with micro and nanomechanical resonators.
Authors and Affiliations
About the authors
Silvan Schmid, Dr. sc., is a Full Professor of Micro and Nanotechnology at the Technical University of Vienna (TU Wien), where he leads the Research Unit of Micro and Nanosensors at the Institute of Sensor and Actuator Systems. Before that, he was an Assistant Professor and later an Associate Professor at the Technical University of Denmark (DTU). Professor Schmid is the co-founder and scientific advisor of the TU Wien spin-off Invisible-Light Labs GmbH, founded in 2019. His research focuses on micro- and nanomechanical resonators for sensor applications and fundamental research.
Guillermo Villanueva, Ph.D., is Professor at Ecole Polytechnique Federale de Lausanne (EPFL), Switzerland, in the Mechanical Engineering Institute (IGM). Before joining EPFL, he was a Marie Curie post-doctoral scholar at DTU (Denmark) and Caltech (California, US) and a post-doc at EPFL-LMIS1. Professor Villanueva has been active in the fields of NEMS/MEMS for sensing, having expertisefrom the design and fabrication to the characterization and applicability.
Michael Lee Roukes, Ph.D., is Frank J. Roshek Professor of Physics, Applied Physics, and Bioengineering at the California Institute of Technology (Caltech). He was founding Director of Caltech’s Kavli Nanoscience Institute from 2003-2006 and Co-Director from 2008-2013. Professor Roukes' scientific interests range from fundamental science to applied biotechnology – with a unifying theme centered on the development, application, and very-large-scale integration of complex nanostructures.
Bibliographic Information
Book Title: Fundamentals of Nanomechanical Resonators
Authors: Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes
DOI: https://doi.org/10.1007/978-3-031-29628-4
Publisher: Springer Cham
eBook Packages: Engineering, Engineering (R0)
Copyright Information: The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerland AG 2023
Hardcover ISBN: 978-3-031-29627-7Published: 19 May 2023
Softcover ISBN: 978-3-031-29630-7Published: 19 May 2024
eBook ISBN: 978-3-031-29628-4Published: 18 May 2023
Edition Number: 2
Number of Pages: XII, 207
Number of Illustrations: 1 b/w illustrations
Topics: Nanotechnology and Microengineering, Nanotechnology, Materials Science, general, Optical and Electronic Materials, Optical and Electronic Materials