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Table of contents(88 papers)
About this book
Editors and Affiliations
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Lehrstuhl für Technische Elektrophysik, Technische Universität München, Munich, Federal Republic of Germany
Gerhard Wachutka, Gabriele Schrag
Bibliographic Information
Book Title: Simulation of Semiconductor Processes and Devices 2004
Editors: Gerhard Wachutka, Gabriele Schrag
DOI: https://doi.org/10.1007/978-3-7091-0624-2
Publisher: Springer Vienna
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Wien 2004
Hardcover ISBN: 978-3-211-22468-7Published: 23 August 2004
Softcover ISBN: 978-3-7091-7212-4Published: 05 November 2012
eBook ISBN: 978-3-7091-0624-2Published: 06 December 2012
Edition Number: 1
Number of Pages: XII, 379
Topics: Electronics and Microelectronics, Instrumentation, Optical and Electronic Materials, Nanotechnology, Computational Intelligence, Simulation and Modeling