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Table of contents (8 chapters)
Keywords
About this book
Authors and Affiliations
Bibliographic Information
Book Title: Laser Processing of Thin Films and Microstructures
Book Subtitle: Oxidation, Deposition and Etching of Insulators
Authors: Ian W. Boyd
Series Title: Springer Series in Materials Science
DOI: https://doi.org/10.1007/978-3-642-83136-2
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 1987
Softcover ISBN: 978-3-642-83138-6Published: 15 December 2011
eBook ISBN: 978-3-642-83136-2Published: 08 March 2013
Series ISSN: 0933-033X
Series E-ISSN: 2196-2812
Edition Number: 1
Number of Pages: VIII, 320