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Laser Processing of Thin Films and Microstructures

Oxidation, Deposition and Etching of Insulators

  • Textbook
  • © 1987

Overview

Authors:
  1. Ian W. Boyd

    1. Department of Electronic and Electrical Engineering, University College London, London, UK

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Part of the book series: Springer Series in Materials Science (SSMATERIALS, volume 3)

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Table of contents (8 chapters)

  1. Front Matter

    Pages I-VIII
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  2. Introduction

    • Ian W. Boyd
    Pages 1-14

  3. Interactions and Kinetics

    • Ian W. Boyd
    Pages 15-99

  4. Experimental Considerations

    • Ian W. Boyd
    Pages 100-133

  5. Laser-Assisted Oxidation and Nitridation

    • Ian W. Boyd
    Pages 134-189

  6. Passivation by Laser Annealing and Melting

    • Ian W. Boyd
    Pages 190-208

  7. Laser-Induced Deposition

    • Ian W. Boyd
    Pages 209-235

  8. Material Removal

    • Ian W. Boyd
    Pages 236-271

  9. Summary and Conclusions

    • Ian W. Boyd
    Pages 272-286

  10. Back Matter

    Pages 287-320
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Keywords

About this book

This text aims at providing a comprehensive and up to date treatment of the new and rapidly expanding field of laser pro­ cessing of thin films, particularly, though by no means exclu­ sively, of recent progress in the dielectrics area. The volume covers all the major aspects of laser processing technology in general, from the background and history to its many potential applications, and from the theory to the necessary experimental considerations. It highlights and compares the vast array of processing conditions now available with intense photon beams, as well as the properties of the films and microstructures pro­ duced. Separate chapters deal with the fundamentals of laser interactions with matter, and with experimental considerations. Detailed consideration is also given to film deposition, nuclea­ tion and growth, oxidation and annealing, as well as selective and localized. etching and ablation, not only in terms of the various photon-induced processes, but also with respect to traditional as well as other competing new technologies.

Authors and Affiliations

  • Department of Electronic and Electrical Engineering, University College London, London, UK

    Ian W. Boyd

Bibliographic Information

  • Book Title: Laser Processing of Thin Films and Microstructures

  • Book Subtitle: Oxidation, Deposition and Etching of Insulators

  • Authors: Ian W. Boyd

  • Series Title: Springer Series in Materials Science

  • DOI: https://doi.org/10.1007/978-3-642-83136-2

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag Berlin Heidelberg 1987

  • Softcover ISBN: 978-3-642-83138-6Published: 15 December 2011

  • eBook ISBN: 978-3-642-83136-2Published: 08 March 2013

  • Series ISSN: 0933-033X

  • Series E-ISSN: 2196-2812

  • Edition Number: 1

  • Number of Pages: VIII, 320

  • Topics: Optics, Lasers, Photonics, Optical Devices

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