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Nanoimprint Lithography: An Enabling Process for Nanofabrication

  • Book
  • © 2013

Overview

Authors:
  1. Weimin Zhou

    1. Shanghai Nanotechnology Promotion Center, Shanghai, China, People's Republic

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  • Provides consistent multi-disciplinary approach demonstrating principles of the field including latest achievements in hot areas such as nanofabrication and nanotechnology
  • Includes approximately 200 figures and tables to explain the topic
  • Presents current status and future trends of nanoimprint lithography research

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Table of contents (10 chapters)

  1. Front Matter

    Pages i-xiii
    Download chapter PDF

  2. Introduction

    • Weimin Zhou
    Pages 1-4

  3. Principles and Status of Nanoimprint Lithography

    • Weimin Zhou
    Pages 5-32

  4. Stamp Fabrication

    • Weimin Zhou
    Pages 33-74

  5. Stamp Surface Treatment

    • Weimin Zhou
    Pages 75-98

  6. Nanoimprint Lithography Resists

    • Weimin Zhou
    Pages 99-110

  7. Nanoimprint Lithography Process

    • Weimin Zhou
    Pages 111-146

  8. Modeling and Simulation of NIL

    • Weimin Zhou
    Pages 147-160

  9. Application of NIL in Light-Emitting Diode

    • Weimin Zhou
    Pages 161-202

  10. Application of NIL in Memory Devices

    • Weimin Zhou
    Pages 203-216

  11. Application of NIL in Solar Cell

    • Weimin Zhou
    Pages 217-249

  12. Back Matter

    Pages 251-256
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Keywords

About this book

Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application.
This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology.
Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.

Authors and Affiliations

  • Shanghai Nanotechnology Promotion Center, Shanghai, China, People's Republic

    Weimin Zhou

About the author

Weimin Zhou Received a Ph.D. degree in Microelectronics and Solid-State Electronics from Shanghai Jiao Tong University, China. He is currently a Professor of Nanomaterials and Nanoelectronics in Shanghai Nanotechnology Promotion Center. His research interests cover semiconductor nanomaterials (nanowires, carbon-based, phase change material), novel semiconductor or nano devices, and nanofabrication, and lithium ion battery, etc. He has authored or coauthored more than 30 papers in scientific journals and is the holder of four patents in the micro/nano electronics area and material Engineering. Some research achievement is highlighted by Nature Nanotechnlogy magazine. He is also a reviewer for many scientific magazines, such as Appl. Phys. Lett, Nanotechnolgoy.

Education:
1996.9-2000.7 Anhui polytechnic University, major in mechanical engineering
2001.9-2003.7 Harbin institute of technology, material engineering.
2004.3-2007.3 Shanghai Jiao Tong University, major in Microelectronics and Solid-State Electronics
2007.4-2009.4 Postdoctral Fellow at Shanghai Institute of Microsystem and Information Technology        

Work experience :
2004.3-2007.3 one –dimensional nanostructure and its application in nanodevices, Fabrication of semiconductor nanowrie/ nanotube, carbon nanotube
2007.4-2009.4 Nanoimprint lithography process and its application in light emitting diodes.  
2009.4- now Associate Professor at Shanghai Nanotechnology Promotion Center Nanoimprint lithography and its application in nanodevices( biosensor, solar cell .et al )

Bibliographic Information

  • Book Title: Nanoimprint Lithography: An Enabling Process for Nanofabrication

  • Authors: Weimin Zhou

  • DOI: https://doi.org/10.1007/978-3-642-34428-2

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Engineering, Engineering (R0)

  • Copyright Information: Springer-Verlag Berlin Heidelberg 2013

  • Hardcover ISBN: 978-3-642-34427-5Published: 04 January 2013

  • Softcover ISBN: 978-3-662-51086-5Published: 23 August 2016

  • eBook ISBN: 978-3-642-34428-2Published: 04 January 2013

  • Edition Number: 1

  • Number of Pages: XIII, 249

  • Topics: Nanotechnology and Microengineering, Optical and Electronic Materials, Nanotechnology, Nanochemistry

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