Overview
- Summarizes the current knowledge in implanted rare earth materials
- Includes structural microelectric device aspects
- A reference work for researchers and engineers alike
- Includes supplementary material: sn.pub/extras
Part of the book series: Springer Series in Materials Science (SSMATERIALS, volume 142)
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Table of contents (7 chapters)
Keywords
About this book
Authors and Affiliations
Bibliographic Information
Book Title: Rare-Earth Implanted MOS Devices for Silicon Photonics
Book Subtitle: Microstructural, Electrical and Optoelectronic Properties
Authors: Lars Rebohle, Wolfgang Skorupa
Series Title: Springer Series in Materials Science
DOI: https://doi.org/10.1007/978-3-642-14447-9
Publisher: Springer Berlin, Heidelberg
eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2010
Hardcover ISBN: 978-3-642-14446-2Published: 21 October 2010
Softcover ISBN: 978-3-642-26558-7Published: 01 December 2012
eBook ISBN: 978-3-642-14447-9Published: 20 October 2010
Series ISSN: 0933-033X
Series E-ISSN: 2196-2812
Edition Number: 1
Number of Pages: XVIII, 174
Number of Illustrations: 117 b/w illustrations, 3 illustrations in colour
Topics: Optical and Electronic Materials