Authors:
- This is the first book in which the tremendous developments of the recent years are recorded
- The authors played active roles in the research projects which lead to this new technologies
- Revised translation of a well-established German graduate textbook
- Includes supplementary material: sn.pub/extras
Part of the book series: Springer Series in Advanced Microelectronics (MICROELECTR., volume 2)
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Table of contents (8 chapters)
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Front Matter
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Back Matter
About this book
Authors and Affiliations
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semiconductor technology development, Infineon Technologies, Munich, Germany
Dietrich Widmann
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Department of Electrical Engineering and Information Technologies, Munich University of Applied Sciences, Munich, Germany
Hermann Mader
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TELA Versicherungs AG, Munich, Germany
Hans Friedrich
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Technical University Munich, Munich, Germany
Walter Heywang, Rudolf Müller
Bibliographic Information
Book Title: Technology of Integrated Circuits
Authors: Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller
Series Title: Springer Series in Advanced Microelectronics
DOI: https://doi.org/10.1007/978-3-662-04160-4
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 2000
Hardcover ISBN: 978-3-540-66199-3Published: 06 July 2000
Softcover ISBN: 978-3-642-08547-5Published: 21 October 2010
eBook ISBN: 978-3-662-04160-4Published: 09 March 2013
Series ISSN: 1437-0387
Series E-ISSN: 2197-6643
Edition Number: 1
Number of Pages: XVIII, 342
Topics: Electronics and Microelectronics, Instrumentation, Optical and Electronic Materials, Industrial Chemistry/Chemical Engineering