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Microstructuring of Glasses

  • Book
  • © 2008

Overview

  • First book on structuring glass for micro- and nanophotonic applications
  • Includes supplementary material: sn.pub/extras

Part of the book series: Springer Series in Materials Science (SSMATERIALS, volume 87)

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Table of contents (11 chapters)

Keywords

About this book

As microstructured glass becomes increasingly important for microsystems technology, the main application fields include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators and implants. And, because glass has quite distinct properties from silicon, PMMA and metals, applications exist where only glass devices meet the requirements. The main advantages of glass derive from its amorphous nature, the precondition for its - theoretically - direction-independent geometric structurability. Microstructuring of Glasses deals with the amorphous state, various glass compositions and their properties, the interactions between glasses and the electromagnetic waves used to modify it. Also treated in detail are methods for influencing the geometrical microstructure of glasses by mechanical, chemical, thermal, optical, and electrical treatment, and the methods and equipment required to produce actual microdevices.

Authors and Affiliations

  • Technische Universität Ilmenau, 98693, Germany

    Dagmar Hülsenberg

  • Silicaglas Ilmenau, 98704, Germany

    Alf Harnisch

  • Department of Chemical Engineering Polymer and Composite Engineering Group (PaCE), Imperial College London, SW7 2AZ, UK

    Alexander Bismarck

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