Overview
- Satisfies the demand for literature on analysis and design of microsystems
- Deals with a wide range of industrial applications
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Table of contents(17 chapters)
About this book
Editors and Affiliations
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Institute for Microsystem Technology IMTEK, University of Freiburg, Freiburg, Germany
Jan G. Korvink, Oliver Paul
Bibliographic Information
Book Title: MEMS: A Practical Guide of Design, Analysis, and Applications
Editors: Jan G. Korvink, Oliver Paul
DOI: https://doi.org/10.1007/978-3-540-33655-6
Publisher: Springer Berlin, Heidelberg
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2006
Hardcover ISBN: 978-3-540-21117-4Published: 08 March 2006
Softcover ISBN: 978-3-662-56835-4Published: 30 March 2019
eBook ISBN: 978-3-540-33655-6Published: 28 May 2010
Edition Number: 1
Number of Pages: XXV, 965
Additional Information: Jointly published with William Andrew, Norwich, New York, USA
Topics: Electronics and Microelectronics, Instrumentation, Optical and Electronic Materials, Nanotechnology, Microwaves, RF and Optical Engineering