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Table of contents (9 chapters)
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Front Matter
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Back Matter
About this book
The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator; smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe. In future scanning probe systems, the large actuators will be replaced with cantilevers where the actuators are integrated on the beam. These will be combined in arrays of multiple cantilevers with MEMS as the key technology for the fabrication process.
Reviews
The Physicist, 37:2 (2000)
Authors and Affiliations
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Nanodevices, Inc., USA
S. C. Minne
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Massachusetts Institute of Technology, USA
S. R. Manalis
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Stanford University, USA
C. F. Quate
Bibliographic Information
Book Title: Bringing Scanning Probe Microscopy up to Speed
Authors: S. C. Minne, S. R. Manalis, C. F. Quate
Series Title: Microsystems
DOI: https://doi.org/10.1007/978-1-4615-5167-6
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Kluwer Academic Publishers 1999
Hardcover ISBN: 978-0-7923-8466-3Published: 28 February 1999
Softcover ISBN: 978-1-4613-7353-7Published: 11 February 2013
eBook ISBN: 978-1-4615-5167-6Published: 06 December 2012
Series ISSN: 1389-2134
Edition Number: 1
Number of Pages: XIII, 159
Topics: Optical and Electronic Materials, Surfaces and Interfaces, Thin Films, Electrical Engineering, Characterization and Evaluation of Materials