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Table of contents (42 chapters)
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Front Matter
Keywords
About this book
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes.
This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.
Authors and Affiliations
Bibliographic Information
Book Title: Lecture Notes on Principles of Plasma Processing
Authors: Francis F. Chen, Jane P. Chang
DOI: https://doi.org/10.1007/978-1-4615-0181-7
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 2003
Softcover ISBN: 978-0-306-47497-2Published: 31 January 2003
eBook ISBN: 978-1-4615-0181-7Published: 06 December 2012
Edition Number: 1
Number of Pages: XI, 208
Number of Illustrations: 177 b/w illustrations
Topics: Nuclear Physics, Heavy Ions, Hadrons, Optical and Electronic Materials, Industrial Chemistry/Chemical Engineering